TDSU Micro- & Nanostructuring

The TDSU 1 assists in the realization of micro- and nanostructures on planar samples. Therefore, the TDSU operates and maintains several tools for fabrication and inspection inside and outside the cleanroom. The following processing is possible: lithography (Electron beam and optical lithography), dry  etching (reactive ion etching, inductively coupled plasma etching, cryo etching), deposition (atomic layer deposition, plasma enhanced chemical vapor deposition, thermal evaporator, electron beam evaporator, sputtering) and inspection (focused ion beam, scanning electron microscope among others).

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